发明名称 Interferometer system for making length or angle measurements
摘要 The invention is directed to an interferometer which includes two interferometer systems and with which length measurement or angle measurement as well as index of refraction measurement can be conducted simultaneously. For this purpose, at least one component beam from the measuring arm of the one interferometer system and a component beam from a comparison arm of the other interferometer system are directed through an evacuable arrangement.
申请公布号 US4813783(A) 申请公布日期 1989.03.21
申请号 US19870116376 申请日期 1987.11.03
申请人 CARL-ZEISS-STIFTUNG 发明人 TORGE, REIMUND
分类号 G01B9/02;G01N21/45;(IPC1-7):G01B9/02 主分类号 G01B9/02
代理机构 代理人
主权项
地址