| 摘要 |
PURPOSE:To use an objective lens for measurement collimation also as an objective lens for distance measurement by providing a condensing grating coupler (FGC) to an optical substrate. CONSTITUTION:Coherent luminous flux Pi emitted by a coherent light source is made incident on an incidence optical waveguide 13 and intensity-modulated by a light intensity modulation part 7. Then a 1st light quantity adjustment part 9 adjusts the quantity of light through an optical path switching part 8. Further, the adjusted coherent luminous flux is sent out to an object by a 1st FGC 11 which condenses the intensity-modulated coherent luminous flux outside the optical substrate and on the focus position of an objective optical system. Further, reflected light from the objective lens is photodetected by a 2nd FGC through which reflected luminous flux converted outside the optical substrate 6 and on the focus position of the objective optical system is made incident on a photodetection waveguide 42. |
