发明名称 LEAD INSPECTING DEVICE FOR SEMICONDUCTOR DEVICE
摘要 PURPOSE:To inspect whether or not the curvature peak parts of leads are all on the same plane only by making an observation from the top surface by bringing the lead curvature part of a PLCC into contact with the reverse surface of a light transmissive plate irradiated sidewards and discriminating the light part of the contacting part and the dark part of a noncontact part. CONSTITUTION:The PLCC 1 as a work to be inspected is positioned on a positioning block 2 and lifted by an up-down cylinder 3, so that the lead curvature part 1a of the PLCC 1 contacts the reverse surface of a transparent acryl plate 4. An illuminating device 5 on the flank of the acryl plate 4 lights up the part where the curvature part 1a contacts the acryl plate 4. An image pickup device 6 picks up an image of the PLCC 1 and an image processor 7 processes and decides image pickup data to inspect whether or not the peak parts of curvature parts 1a of the PLCC 1 are all on the same plane.
申请公布号 JPS6474437(A) 申请公布日期 1989.03.20
申请号 JP19870232873 申请日期 1987.09.17
申请人 NEC KYUSHU LTD 发明人 FUJIMOTO DAISUKE
分类号 G01N21/88;G01B11/24;G01N21/956;H01L21/66;H01L23/50;H05K13/08 主分类号 G01N21/88
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