摘要 |
PURPOSE:To improve joining reliability, by a method wherein a tungsten wire is wound around the end part of a tungsten heat generating wire, buried in a ceramic vortex chamber, to join it to a terminal metallic plate. CONSTITUTION:A tungsten wire 11 is wound around the end part of a tungsten heat generating wire 10, buried in a ceramic vortex chamber 1, to form a wide part 11a to an end surface 10b of the heat generating wire 10. The wide part 11a is exposed to the outer peripheral surface of the ceramic vortex chamber 1, and a terminal metallic plate 9 is joined with the wide part 11a. This constitution enables increase of the area of the end surface of the heat generating wire and permits improvement of joining reliability. |