| 摘要 |
PURPOSE:To obtain the title silicon carbide composite sintered body having a low electric resistance and capable of being easily electrically worked by forming the mixed powder contg. a alumina and silicon carbide in a specified weight ratio, primarily sintering the formed product in a nonoxidizing atmosphere, bringing the sintered body into contact with silicon at a prescribed temp., and then secondarily sintering the material. CONSTITUTION:The mixed power contg. 0.1-30wt.% alumina and the balance silicon carbide is formed. The formed product is primarily sintered at 1,400-2,000 deg.C in a nonoxidizing atmosphere, and the sintered body is brought into direct contact with silicon at >=1,800 deg.C and then secondarily sintered to infiltrate silicon into the body. As a result, a silicon carbide composite sintered body contg. 45-75wt.% silicon carbide, 25-39wt.% silicon, and 0.05-16wt.% aluminum nitride is obtained. Since the electrical working such as electric discharge maching and electrolytic polishing can be applied to the silicon carbide composite sintered body, sintered bodies of complicated shapes having high dimensional precision can be easily produced. |
