| 摘要 |
PURPOSE:To obtain a superconducting coil, in which a superconductive material is not required to be formed into a wire shape, by forming a spiral shaped film comprising a composite oxide superconductive material including CuxOy on the surface of a ring shaped substrate. CONSTITUTION:A spiral shaped film 2 comprising a composite oxide superconductive material including CuxOy is formed on the surface of a ring shaped substrate 1. For example, the ring shaped substrate 1 comprising Al2O3 is set in the vacuum container of a laser beam vacuum evaporation apparatus. A masking member having a spiral opening is brought into contact with the lower surface of the substrate 1 closely. CO2 laser is projected to an film evaporating source comprising Y1Ba2Cu3O7-y. The spiral film 2 comprising the superconductive material is formed on the surface of the substrate 1. |
