| 摘要 |
PURPOSE: To improve the resolution and reproducibility obtained by the image reverse process of a photo resist film by programming in a computer information about the extent of a reaction due to an applied heat in a photo resist film, inputting the heating temp. to the computer to control the takeoff of substrates from a furnace. CONSTITUTION: In a computer 21 is programmed information describing the extent of the decomposition resulting from a thermally caused reaction of a compd. contained in a radiation-sensitive film on a substrate 20 unmasked portions of which are exposed to actinic rays. A temp. detector 23 is mounted on this sensitive film to provide a temp. detection output to be inputted to the computer 21 during a heating step in a furnace 19. The computer 21 is used to control the takeoff of the substrate 20 from the furnace 19 when specified extent of the decomposition of the compd. is reached, according to the programmed information, temp. information from the detector 23 and lapsed time. |
