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发明名称
COATING DEVICE
摘要
申请公布号
JPS6473618(A)
申请公布日期
1989.03.17
申请号
JP19870231383
申请日期
1987.09.14
申请人
NEC KYUSHU LTD
发明人
YAMAUCHI NOBUYOSHI
分类号
B05C11/08;G03F7/16;H01L21/027;H01L21/30
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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