摘要 |
PURPOSE:To improve the critical current density JC as well as to increase the pinning effect by dispersing a non-superconductive substance minutely in a superconductive formation. CONSTITUTION:By using plural targets consisting of compounds including atoms to compose a superconductor respectively and a target of a non-superconductive substance, substances to compose the superconductor and a non-superconductive substance are spread on a base member at a desired thickness at a time in the chemical vapor disposition. As the atoms to compose the superconductor, an alkaline earth metal, a rare earth element, copper, and oxygen, of Y-Ba-Cu-O system, Y-Sr-Cu-O system, La-Sr-Cu-O system, and the like are preferable to use. Powders of Y2O3, BaCO3, and CuO, for example, are made into a formation, and then sintered to form a superconductive formation. On the other hand, oxide powders of non-superconductors such as MgO0.9, CaO0.9, Ce2O2.95, and BeO0.9 are crushed and made into a formation. Then, they are set on separate target holders in a high-frequency sputtering device, and a ceramics superconductive formation in which some of the oxides is dispersed is spread on the heated MgO substrate as coating, in the mixing gas of argon and oxygen. |