ROBOT HAND FOR MOVING SEMICONDUCTOR WAFER CARRIER

摘要

PURPOSE: To judge the success of the grip operation and safety after the operation starts with a carrier gripped with a gripper by detecting the collision in addition to the carry-up of a detected workpiece. CONSTITUTION: Between plates 12, 14, rotary solenoid actuators 18 are disposed and fixed to a rear plate 14. Front protrusions of the actuators 18 are rotatably positioned in circular holes piercing the front plate and have cassette coupling arms 22. A series of return springs 32 function to lessen the shock of the plate when a robot element strikes against unexpected obstacle. Impact sensors 34 send stop signals to the robot elements when receiving an undesired resistance or impact.