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经营范围
发明名称
EXHAUSTING METHOD AND EQUIPMENT
摘要
申请公布号
JPS6471035(A)
申请公布日期
1989.03.16
申请号
JP19870227360
申请日期
1987.09.10
申请人
TOSHIBA CORP
发明人
ISHIHARA HIROO;NEMOTO SHOZO
分类号
H01J9/385
主分类号
H01J9/385
代理机构
代理人
主权项
地址
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