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经营范围
发明名称
FORMATION OF INSULATING FILM
摘要
申请公布号
JPS6471152(A)
申请公布日期
1989.03.16
申请号
JP19870226428
申请日期
1987.09.11
申请人
FUJITSU LTD
发明人
SUZUKI TAKUMI
分类号
H01L21/768;H01L21/31
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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