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发明名称
MEASUREMENT OF POTENTIAL OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6471142(A)
申请公布日期
1989.03.16
申请号
JP19870219419
申请日期
1987.09.01
申请人
NEC CORP
发明人
HOSOI HIROYUKI
分类号
G01R31/302;G01R31/28;H01L21/66
主分类号
G01R31/302
代理机构
代理人
主权项
地址
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