发明名称 CONTAINER FOR JIG
摘要 PURPOSE:To eliminate the need for manual work in each device by managing required work in each of an exchanger, a washer and a stocker device by a controller. CONSTITUTION:Each of working processes 1, 2, an exchanger 3, a washer 5 and a stocker device 6 is connected to a controller 7 managing these devices and processes. To be concrete, a jig 4a used in the first working process and a jig 4b housed in the stocker device 6 are carried into the exchanger 3. A product included into the jig 4a is shifted into the jig 4b not employed in the device 3. The jig 4b is carried to the second working process 2 from the device 3, and required working treatment is executed. On the other hand, the jig 4a is washed by the washer 5, and stored in the device 6.
申请公布号 JPS6471146(A) 申请公布日期 1989.03.16
申请号 JP19870228827 申请日期 1987.09.10
申请人 MITSUBISHI ELECTRIC CORP 发明人 INOBE TAKAMASA
分类号 H01L21/304;H01L21/673;H01L21/68 主分类号 H01L21/304
代理机构 代理人
主权项
地址