发明名称 ELECTRODE MATERIAL FOR SEMICONDUCTOR DEVICE
摘要 PURPOSE:To eliminate an increase in a leakage current even if the thickness of an N<+> type layer is small with low contacting resistance by mixing Ag powder, at least one of Mo, W and the like, an organic binder, an organic solvent and, as required glass or Pb powder, printing and baking the mixture on the substrate of silicon or the like. CONSTITUTION:Ag powder having a particle size of 1mum or lower, Ni powder having a particle size of 2mum or lower, and PbO-B2O5-SiO2 glass frit are weighed. The mixture is kneaded while adding viscous solution dissolved with 90 parts by weight of alpha-terpineol with 10 parts by weight of ethyl cellulose, thereby preparing a paste electrode material having approx. 200 poise of viscosity. An N<+> type layer 2 having a depth of 0.3-0.5mum is formed by ion implantation on one side surface of a P type silicon substrate 1 as a substrate for a solar battery, and a P<+> type layer 3 having a depth of 1-2mum is formed by aluminum diffusion on the opposite surface. The electrode material is screen printed in a pectinated pattern on the layer 2 of the substrate 1, and in a pattern on the layer 3, dried, thereby forming a light receiving electrode 4 and a back surface electrode 5. This substrate is baked in nitrogen gas which contains 50ppm of oxygen.
申请公布号 JPS5933869(A) 申请公布日期 1984.02.23
申请号 JP19820143203 申请日期 1982.08.20
申请人 HITACHI SEISAKUSHO KK 发明人 MATSUYAMA HARUHIKO;NAKATANI MITSUO;OKUNAKA MASAAKI;YOKONO ATARU;ISOGAI TOKIO;SAITOU TADASHI;MIDORIKAWA SUMIYUKI
分类号 H01L31/04;H01L21/28;H01L21/283;H01L21/288;H01L29/43;H01L29/45 主分类号 H01L31/04
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