VERBINDUNGSSCHICHT AUF EINGEGRABENEM DIELEKTRIKUM UND VERFAHREN ZUR HERSTELLUNG EINER SOLCHEN

摘要

Trenches (2) are formed in three rows in a major surface of a semiconductor substrate (1). The major surface of the semiconductor substrate (1) including the inside of the trenches (2) is thermally oxidized. A first oxide film (4) filling the trenches is formed by thermal oxidation, a second oxide film (4) is formed in a region of the semiconductor substrate interposed between the trenches, and a third oxide film (3) is formed on the major surface of the semiconductor substrate excluding the region interposed between the trenches. The upper surfaces of the first, second and third oxide films (3, 4) are etched away to be flattened, whereby the semiconductor substrate (1) is exposed so that an interconnection (5) is formed on the remaining first and second oxide films (4).