| 摘要 |
PURPOSE:To generate spatially uniform plasma in laser gas, and enable the sure sealing of laser gas with a simple structure, by arranging a conductor wall with a groove bottom which faces dielectric being a microwave incident window. CONSTITUTION:Dielectric 25 composed of aluminum and the like faces a conductor wall 24, and covers the aperture part of a groove 23 to act as an incidence window of microwave. By intense microwave electromagnetic field generating so as to concentrate in the vicinity of ridges 21, 22, laser gas sealed in a discharge space 26 is subjected to discharge breakdown, plasma is generated, and laser medium is excited. The discharge space 26 is formed between the conductor wall 24 and the dielectric 25 which is arranged so as to face the conductor wall 24 and serves as an incidence window of microwave. In this discharge space 26, microwave discharge is generated, and microwave enters only from the one side surface of plasma. Thereby, enabling the discharge by a desired microwave mode. Further, since the dielectric 25 and the conductor wall 24 face each other, the mode has an electric field component vertical to the conductor wall 24, and electric field penetrating the plasma generates. |
