| 摘要 |
PURPOSE:To generate stable and spatially uniform plasma, and enable large output laser operation with high efficiency, by arranging a conductor wall with conductivity higher than plasma, which faces dielectric being a microwave incident window, and bonding the dielectric and a part of microwave circuit wherein the conductor wall is formed, with epoxy system adhesive agent. CONSTITUTION:By intense microwave electromagnetic field being generated so as to concentrate in the vicinity of ridges 21, 22, laser gas sealed in a dis charge space 25 is subjected to discharge breakdown, plasma is generated, and laser medium is excited. The discharge space 25 is formed between the conductor wall 28 and the dielectric 24 which is arranged so as to face the conductor wall 23 and serves as an incidence window of microwave. In this discharge space 25, microwave discharge is generated, and microwave enters only from the one side surface of plasma. Thereby, enabling the discharge by a desired microwave mode. A contacting part between the dielectric 24 and the upper surface of a ridge 12 where the conductor wall 23 is formed, is bonded with epoxy system adhesive agent 26, and the laser gas in the dis charge space 25 is completely sealed without leaking. |
