| 摘要 |
PURPOSE:To produce microwave discharge plasma into even one both spacially and secularly and to make possible a high-efficiency and large-output laser operation by a method wherein carbonic acid gas laser gas is encapsulated between a conductor wall constituting part of a microwave circuit and a dielectric opposed to this conductor wall, the dielectric is used as a microwave incident window, a mode of a microwave having an electric field component vertical to the boundary between the dielectric and generated plasma is incided and a microwave which is excited is turned into a pulse, whose quiescent period is shorter than the thermal time constant of the carbonic acid gas laser gas. CONSTITUTION:A mode of a microwave having an electric field component vertical to the boundary between a dielectric 25 and plasma is formed by a microwave circuit. As the dielectric 25 and a conductor wall 24 oppose to each other, an electric field to penetrate the plasma is formed and spacially even discharge plasma is generated. Here, an exciting power supply 4 rectifies an AC power supply 40, the DC is converted into a high-frequency AC by a DC-AC inverter circuit 44, the voltage of the AC is boosted, the AC is rectified by a halfwave voltage multiplying circuit 44 to generate a highvoltage pulsating current, a magnetron 3 is excited and pulses microwaves, whose quiescent time is shorter sufficiently than the thermal time constant of the carbonic acid gas laser gas, are generated. |
