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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6468943(A)
申请公布日期
1989.03.15
申请号
JP19870227412
申请日期
1987.09.09
申请人
NEC CORP
发明人
SEKIYA KIYOUZOU
分类号
H01L21/76;H01L21/265
主分类号
H01L21/76
代理机构
代理人
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地址
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