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经营范围
发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6468941(A)
申请公布日期
1989.03.15
申请号
JP19870225912
申请日期
1987.09.09
申请人
MITSUBISHI ELECTRIC CORP
发明人
SAKAMOTO MITSUO
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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