| 摘要 |
PURPOSE:To generate spatially uniform plasma, and enable large output laser oscillation with small-sized equipment, by arranging a conductor wall with conductivity higher than plasma, which wall faces dielectric being a microwave incident window, and turning back a laser optical path with a turning-back mirror arranged at an end-portion of a space. CONSTITUTION:By intense microwave electromagnetic field being generated so as to concentrate in the vicinity of ridges 21, 22, laser gas such as carbon dioxide gas laser gas sealed in a discharge space 26 is subjected to discharge breakdown, plasma is generated, and laser medium is excited. Between a totally reflecting mirror 27 and a partially transmitting mirror 28, an optical path is turned back by a turning-back mirror 29, and thereby obtaining laser oscillating light. The discharge space 26 is formed between the conductor wall 24 and the dielectric 25 which is arranged so as to face the conductor wall 24 and serves as an incidence window of microwave. In this discharge space 26, microwave discharge is generated, and the microwave enters only from the one side surface of plasma 31, thereby, enabling the discharge by a desired microwave mode. |
