Device for the precision adjustment of a unit with respect to a reference system, and its use.

摘要

A precision-adjustment device (29) comprises two groups of three piezoelectric components (7, 8) fixed respectively to two rings (1, 2), each forming an electrode for the group of piezoelectric components which it carries. The other electrode of these components is formed by an evaporated layer (15). The layers (15) are connected together by wires (16). The rings (1, 2) are rigidly fixed to each other by three small bars (17) located in the middle of the length of the components (7, 8). Feet (4) fix the ring (1) to an element (5) and the ring (2) to an element (6). The components (7, 8) are conditioned so as to be curved in opposite directions when an electrical voltage is applied to the electrodes (1, 2) and (15). Depending on the polarity of this voltage, the element (6) is moved away or towards the element (5). This device may be used in microscopes with a view to very precise focusing of their objective.