Method and apparatus for continuous throughput in a vacuum environment,申请号US19870042507-传众专利搜索

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发明名称	Method and apparatus for continuous throughput in a vacuum environment
摘要
申请公布号	US4812101(A)	申请公布日期	1989.03.14
申请号	US19870042507	申请日期	1987.04.27
申请人	AMERICAN TELEPHONE AND TELEGRAPH COMPANY, AT&T BELL LABORATORIES	发明人	GEORGE, CARROLL H.;LYNOTT, GUY W.;PARGELLIS, ANDREW N.
分类号	H01L21/02;C23C14/56;H01L21/00;H01L21/302;H01L21/3065;H01L21/677;H05K3/00;H05K3/14;(IPC1-7):B65G65/00	主分类号	H01L21/02
代理机构		代理人
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