MANUFACTURE OF SUPERCONDUCTOR CERAMIC THIN FILM

摘要

PURPOSE:To obtain a good lanthanum-copper composite oxide thin film by mixing the carrier gas containing ultrasonic wave-atomized fine grains of a lanthanum compound solution and the carrier gas containing ultrasonic wave- atomized fine grains of a copper compound solution and bringing the mixture into contact with a preheated heat-resistant substrate. CONSTITUTION:A lanthanum compound solution and a copper compound solution are atomized end dispersed respectively in the carrier gas by the ultrasonic vibration at the frequency of 0.8-3.0MHz, the carrier gas containing fine grains of the lanthanum compound solution and the carrier gas containing fine grains of the copper compound solution are mixed. The mixture is brought into contact with a preheated heat-resistant substrate, and the post heat treatment is applied as required. An organic solvent-soluble one may be used for the lanthanum compound, and organic acid salt of lanthanum or beta-diketone complex salt of lanthanum is preferable. A superconductor ceramic thin film made of lanthanum- copper composite oxide with high electric reliability and no void, pin hole, crack or the like can be thereby obtained.