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发明名称
INTEGRATED CIRCUIT
摘要
申请公布号
JPS6467931(A)
申请公布日期
1989.03.14
申请号
JP19870226011
申请日期
1987.09.08
申请人
NEC CORP
发明人
WATANABE KAZUTOSHI
分类号
H01L21/822;H01L21/66;H01L27/04
主分类号
H01L21/822
代理机构
代理人
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地址
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