FORMATION OF FILM,申请号JP19870226897-传众专利搜索

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发明名称	FORMATION OF FILM
摘要
申请公布号	JPS6468474(A)	申请公布日期	1989.03.14
申请号	JP19870226897	申请日期	1987.09.10
申请人	TOKYO ELECTRON LTD	发明人	NARITA NORIYOSHI;KAWANISHI YASUHIKO;MATSUSE KIMIHIRO
分类号	C23C16/06;C23C16/48;H01L21/285	主分类号	C23C16/06
代理机构		代理人
主权项
地址

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