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经营范围
发明名称
METHOD OF GETTERING SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6467922(A)
申请公布日期
1989.03.14
申请号
JP19870224730
申请日期
1987.09.08
申请人
NEC CORP
发明人
SUZUKI YOSHIAKI
分类号
H01L21/322;H01L21/02
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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