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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6467921(A)
申请公布日期
1989.03.14
申请号
JP19870224851
申请日期
1987.09.08
申请人
SEIKO INSTR & ELECTRON LTD
发明人
KUDO NOBORU
分类号
H01L29/78;H01L21/31;H01L21/316
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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