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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPS6465856(A)
申请公布日期
1989.03.13
申请号
JP19870221226
申请日期
1987.09.05
申请人
FUJITSU LTD;FUJITSU VLSI LTD
发明人
CHITO TOSHIHIKO
分类号
H01L23/52;H01L21/3205
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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