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发明名称
FINE PROCESSING
摘要
申请公布号
JPS6465846(A)
申请公布日期
1989.03.13
申请号
JP19870223418
申请日期
1987.09.07
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TAKEUCHI YOSHINORI;IDOTA TAKESHI
分类号
H01L21/306;H01L21/28
主分类号
H01L21/306
代理机构
代理人
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地址
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