| 摘要 |
PURPOSE:To contact the quantity of inspection data, by treating a contracted unit picture element to be inspected also as a unit picture element and repeatedly using the design data of only a reference unit of a repeated part for the unit picture element of the repeated part to inspect the unit picture element. CONSTITUTION:A reticle 1 consists of a non-repeated part 2 of a pattern and a repeated part 3 and a reticle pattern to be inspected is divided into unit picture elements 2 consisting of A21-A1n, A31-A3n, Y contracted picture elements 7 consisting of A21-A2n and X contracted picture elements 10 consisting of A31-A33. In the repeated part 3, a reticle pattern is divided into repeated picture elements 8 consisting of S11-S41 and a unit pattern 4 including repeated contracted picture elements 9 consisting of S'11-S'41. The picture elements 7, 9, 10 contracted to the size of unit picture elements to be inspected are also treated as the unit picture elements and the unit picture elements in the non-repeated part 2 are collated in each design data. In the unit picture elements of the repeated part 3, the design data of only the pattern 4 are repeatedly used to inspect the area of the whole reticle. Thus, the quantity of inspection data can be contracted. |
