发明名称 MANUFACTURE OF SELF-ALIGNING HIGH PERFORMANCE LATERAL OPERATION SILICON CONTROL RECTFIER AND STATIC RAM
摘要 PURPOSE: To increase integration density, and reduce the base-collector capacity, and further, reduce the parasitic resistance, by making the rectifier into such a structure, that the width of the base region of a lateral NPN device is drastically reduced and the volume of the region of the storage charge under the base is reduced. CONSTITUTION: A transistor T2 is a lateral PNP device, a transistor T5 is a lateral NPN device, a transistor T3 is a vertical NPN transistor, transistors T1 and T4 are parasitic board PNP transistors, and the width 47 of the lateral NPN base is drastically narrow, since it is self-aligned. A small-sized structure is made and the width of the NPN base is greatly reduced by an emitter and the right end of a base region being self-aligned with the left end of an injector. Because the storage charge under the lateral NPN base decides the switching time, the width is made as narrow as possible.
申请公布号 JPS6464353(A) 申请公布日期 1989.03.10
申请号 JP19880141935 申请日期 1988.06.10
申请人 FAIRCHILD SEMICONDUCTOR CORP 发明人 OSUMAN AASETSUDO AKUKASU
分类号 H01L21/331;H01L21/822;H01L21/8229;H01L27/06;H01L27/102;H01L29/73;H01L29/732;H01L29/74 主分类号 H01L21/331
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