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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPS6464340(A)
申请公布日期
1989.03.10
申请号
JP19870220225
申请日期
1987.09.04
申请人
HITACHI LTD;HITACHI VLSI ENG CORP
发明人
OGIWARA ITARU;IIJIMA SHINPEI;KAWAMOTO YOSHIFUMI
分类号
H01L23/522;H01L21/316;H01L21/768
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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