| 摘要 |
PURPOSE:To obtain a thin film of a superconductive material having high superconductive critical temperatures and a uniform composition and a system by conducting physical evaporation using a target of the mixture of a specific oxide and/or a composite oxide, or of a composite oxide including a specific element, and forming a thin film of a perovskite type oxide or a dummy perovskite type oxide. CONSTITUTION:The following targets are used: a target of the mixture of an oxide including at least one kind selected from a group composed of La, Ba, and Cu and/or a composite oxide, or a target of a composite oxide containing all elements included in the element group mentioned above. An atomic ratio Ba/(Ba+La) and Cu/(Ba+La) in the target are preferably in the range of 0.04-0.96 and 0.5-0.7 respectively. An evaporation atmosphere is made to have Ar and O2, and Ar partial pressure to be in the range of 2.0X10<-3>-9X10<-1>Torr. Physical evaporation can be RF sputtering, and a substrate is heated with a heater when sputtering. One kind can be selected from a group composed of glass, quartz, Si, stainless steel, and ceramics as the substrate. |
