APPARATUS FOR POSITIONING X AND Y SLIDE TABLES

摘要

PCT No. PCT/JP82/00267 Sec. 371 Date Jul. 5, 1983 Sec. 102(e) Date Jul. 5, 1983 PCT Filed Jul. 14, 1982 PCT Pub. No. WO83/00302 PCT Pub. Date Feb. 3, 1983.A positioning device includes an X-direction slide table and a Y-direction slide table which are slidable in directions perpendicular to each other. Stops are adjustable as to their relative positions with respect to the slide tables to define accurate stop positions of the slide tables. Cams and levers shift the slide tables. Biasing devices bias the slide tables against the stops. A linear drive shifts at least one of the slide tables over a predetermined distance against the respective biasing device.