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发明名称
ELECTRON MICROSCOPE
摘要
申请公布号
JPS6463249(A)
申请公布日期
1989.03.09
申请号
JP19870217872
申请日期
1987.09.02
申请人
HITACHI LTD;ARAI TAKESHI
发明人
KOBAYASHI HIROYUKI;SUZUKI AKIO;MORI AKIO;OKAMURA SADAHIKO;KAMIMURA MASASHI
分类号
H01J37/04;H01J37/147;H01J37/26;H01J37/28
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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