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发明名称
摘要
申请公布号
JPS6440089(U)
申请公布日期
1989.03.09
申请号
JP19870135114U
申请日期
1987.09.03
申请人
发明人
分类号
G03F7/20;G12B5/00;H01L21/027;H01L21/30;H01L21/68;H01L41/00
主分类号
G03F7/20
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