发明名称 FORMATION OF MONOMOLECULAR FILM AND APPARATUS FOR LAMINATING SAID FILMS.
摘要 <p>A movable barrier and an auxiliary movable barrier are disposed inside a trough. The barriers can be driven freely with their interrelationship kept constant. The amount of a moving monomolecular film is the same for both of them to prevent disturbance of the flow of the monomolecular film and deposition on a substrate is carried out at a uniform molecular density. The width of the substrate is the same as the length of the movable barrier or the width of the auxiliary movable barrier.</p>
申请公布号 EP0305544(A1) 申请公布日期 1989.03.08
申请号 EP19880902556 申请日期 1988.03.16
申请人 SHINGIJYUTSU KAIHATSU JIGYOUDAN 发明人 MIYATA, SEIZOU;KUMEHARA, HIDEO
分类号 H01L21/368;B05C3/02;B05D1/20;H01L51/05;H01L51/40;(IPC1-7):B05D1/20 主分类号 H01L21/368
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