发明名称 |
FORMATION OF MONOMOLECULAR FILM AND APPARATUS FOR LAMINATING SAID FILMS. |
摘要 |
<p>A movable barrier and an auxiliary movable barrier are disposed inside a trough. The barriers can be driven freely with their interrelationship kept constant. The amount of a moving monomolecular film is the same for both of them to prevent disturbance of the flow of the monomolecular film and deposition on a substrate is carried out at a uniform molecular density. The width of the substrate is the same as the length of the movable barrier or the width of the auxiliary movable barrier.</p> |
申请公布号 |
EP0305544(A1) |
申请公布日期 |
1989.03.08 |
申请号 |
EP19880902556 |
申请日期 |
1988.03.16 |
申请人 |
SHINGIJYUTSU KAIHATSU JIGYOUDAN |
发明人 |
MIYATA, SEIZOU;KUMEHARA, HIDEO |
分类号 |
H01L21/368;B05C3/02;B05D1/20;H01L51/05;H01L51/40;(IPC1-7):B05D1/20 |
主分类号 |
H01L21/368 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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