| 摘要 |
PURPOSE:To promote migration on a substrate and to activate chemical reaction, by making metallic elements and oxygen, which compose an oxide superconductor, become ions and impinge on a substrate. CONSTITUTION:Supply sources 1, 1', 1'' for ions of respective metal elements composing an oxide superconductor and a supply source 2 for oxygen ions are installed inside a chamber which can be provided with vacuum exhaustion. Respective ions 3, 3', 3'', 4 supplied from the ion supply sources 1, 1', 1'' and the oxygen ion supply source 2 are accelerated by an acceleration electrode 5 and made to impinge on a substrate 6. The ion supply sources 1, 1', 1'' are formed of electron impingement type or high frequency type ionization units 8, 8', 8'' mounted on metal evaporation sources 7, 7', 7'' provided with means such as resistance heating, electron bombardment heating, or direct conduction heating. The respective ions 3, 3', 3'' can be transported with acceleration energy different from each other by controlling drawing electrode potentials of the respective ionization units 8, 8', 8''. For example an ECR type of the oxygen ion supply source can be also used. |
