| 摘要 |
PURPOSE:To allow a light beam to converge by turning it back in the direction perpendicular to the surface of a semiconductor substrate and to make it possible to deflect a wire width when compared with the displacement of the light beam emitted position on the end face of light beam emission of a semiconductor laser by a method wherein a semiconductor laser, which can be changed continuously by controlling the beam west position of the emitted light from outside, and a spherical mirror with which the emitted light of the semiconductor laser will be reflected in the prescribed direction, are provided on a semiconductor substrate. CONSTITUTION:A semiconductor substrate 1, a semiconductor laser 2 with which the beam west position of the emitted light formed on the semiconductor substrate 1 can be changed continuously by the control from outside, and the spherical mirror 3, which reflects the light emitted from the semiconductor laser 2 formed on the semiconductor substrate 1 in the direction vertical to the surface of the semiconductor substrate 1, are provided on the title optical beam generator. The position of the emitted light can be continuously changed in the amount of 10mum or thereabout by controlling the current applied to a deflection part. Also, when the spherical mirror 3 is formed into a concaved type, the degree of change of the beam west position on the beam emission end face of the semiconductor laser 2 can be increased as shown by light beams a-c. As a result, the beam west of the semiconductor laser 2 can be modulated by 10mum, and the light beam can also be deflected in the width of 100mum. |
