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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPS6462467(A)
申请公布日期
1989.03.08
申请号
JP19870220745
申请日期
1987.09.03
申请人
MATSUSHITA ELECTRON CORP
发明人
UMEHARA MASAYOSHI
分类号
H01L21/3205;C23C14/40
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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