| 摘要 |
PURPOSE:To prevent the generation of the scattering of a solvent and the rebound of a melt, and to remove a coating film on an end section effectively even in substrates except a circular one by mounting a third tube for discharging the solvent and the melt. CONSTITUTION:First and second tubes 21 and 22 are arranged, forming a clearance 23 so that end sections are opposed vertically, and a third tube 24 is connected while being crossed at right angles with the first and second tubes 21, 22 so as to close one part of the clearance 23. The peripheral section of a substrate 27 coated with a resist 26 is inserted into the clearance 23 so as to be oppositely faced from the axial direction of the third tube 24, and the substrate 27 is turned at low speed of 10-20rpm. A solvent 28 is fed from the tubes 21, 22, the resist 26 at the end section of the substrate 27 is melted, and the solvent and a melt are discharged from the third tube 24. |
