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发明名称
PROCESS FOR PRODUCING CRYSTALS ON A LIGHT-TRANSMISSIVE SUBSTRATE
摘要
申请公布号
EP0289114(A3)
申请公布日期
1989.03.08
申请号
EP19880301700
申请日期
1988.02.26
申请人
CANON KABUSHIKI KAISHA
发明人
YONEHARA, TAKAO
分类号
C30B25/00;C30B23/02;C30B25/02;C30B25/10;C30B25/18;C30B33/00;C30B33/02;H01L21/02;H01L21/20;H01L21/205;H01L21/84;H01L27/12;(IPC1-7):H01L21/268
主分类号
C30B25/00
代理机构
代理人
主权项
地址
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