| 摘要 |
PURPOSE:To move a chip to a home position of a tray by obliquely supporting the tray by using a stage in a specific direction, and vibrating the tray by vibrating means. CONSTITUTION:Chips 5 are placed in the recesses 21 of a tray 20, the tray 20 is fed above the tray chuck 12 of a stage 11, engaged within the chuck groove 14 of the chuck 12, and secured. After the tray 20 is chucked, a lifter 13 is operated to incline the chuck 12, and the tray 20 is so inclined that the one corner of the recess 21 becomes lower than the other corner. Then, the tray 20 is finely vibrated by vibrating means, the chips 5 are slid in the recesses 21, and one corner coincides with the lower corner of the recess 21. Thus, all the chips 5 are brought into contact with the corners of the same positions of the recesses 21, and the chips 5 are positioned. Thereafter, it is attracted by a collet 15, and picked up. |
