Semiconductor device with floating gate.

摘要

A semiconductor device is disclosed, which comprises source and drain regions (21a, 21b) formed in a spaced-apart relation to each other on an isolated semiconductor substrate surface (21), a first conductive layer (24) formed over a channel region between the source and drain regions (21a, 21b) via a gate insulating film (23) and serving as a floating gate electrode, a two-layer insulating film (25, 26) formed on the first conductive layer (24) and consisting of a silicon oxynitride film and a silicon oxide film, and a second conductive layer (27) formed on the two-layer insulating film (25, 26) and serving as a control gate electrode. In the semiconductor device of this structure, the silicon oxynitride film traps less electrons, and electrons are difficultly trapped at the time of data erasing, so that data-erasing characteristics can be improved. Further, since less electrons are trapped, unlike the prior art insulating film utilizing a silicon nitride film, there is no need of providing any silicon oxide film on each side, and with the two-layer structure consisting of the silicon oxynitride film and a silicon oxide film it is possible to obtain sufficient insulation and film thickness reduction.