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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPS6462461(A)
申请公布日期
1989.03.08
申请号
JP19870215402
申请日期
1987.08.31
申请人
HITACHI LTD
发明人
SUDO SHUJI;MITSUOKA KATSUYA;NARUSHIGE SHINJI;HANAZONO MASANOBU
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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