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发明名称
DEVICE FOR PRODUCING ALTERNATING MONOMOLECULAR LAYERS
摘要
申请公布号
EP0211468(B1)
申请公布日期
1989.03.08
申请号
EP19860201506
申请日期
1984.02.27
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人
BARRAUD, ANDRE;LELOUP, JEAN
分类号
B05C3/02;B05C3/09;B05C3/10;B05C9/00;B05D1/20;B32B43/00;H01B19/04;H01L21/368;H01L51/05;H01L51/40;(IPC1-7):B05C3/02
主分类号
B05C3/02
代理机构
代理人
主权项
地址
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