摘要 |
PURPOSE:To obtain a dense and granular sintered compact reduced in oxygen content and having high heat conductivity, by adding carbon and a specific compound as sintering auxiliary to Al2O3 powder, molding the blend and heating the resultant moldings in a nitrogen-containing atmosphere. CONSTITUTION:The aimed aluminum nitride sintered compact containing aluminum nitride as main ingredient as well as containing the first group consisting of 0.01-10.0wt.% of at least one kind of oxides of the groups IIa and IIIa, the second group containing <=2.0wt.% oxygen returning to other than oxide of the first group and the third group consisting of <=1.0wt.% metal impurity other than the above-mentioned groups IIa and IIIa and having >=3.1g/cm<2> density and >=100W/mk thermal conductivity. The above-mentioned sintered compact is obtained by adding and blending carbon and the groups IIa and IIIa compound of periodic table as sintering auxiliary to Al2O3 powder at a prescribed amount, molding the blend in order to afford the required shape and then heating the moldings in nitrogen-containing atmosphere and subjecting Al2O3 to reduction and nitriding. |