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发明名称
IONIZED SUBSTANCE INTRODUCING DEVICE
摘要
申请公布号
JPS6460947(A)
申请公布日期
1989.03.08
申请号
JP19870218234
申请日期
1987.08.31
申请人
NEC CORP
发明人
ISHIDA HISANORI;NAKAMURA TSUYOSHI;KAWASE YUTAKA
分类号
H01J37/08;H01J49/04;H01J49/14
主分类号
H01J37/08
代理机构
代理人
主权项
地址
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